Synopsys Recipe Manager and Editor (RME) is a state-of-the-art recipe management and editing package that far exceeds the typical ‘tool-centric’ solutions offered by equipment vendors. RME’s central recipe repository and recipe tracking technology ensure 100% recipe history traceability, complete version control, and flexible recipe classification thus supporting complete recipe life cycle management. Using the patented Recipe Data Object Model (RDOM) technology, recipes from any process tool can be edited offline through one common graphical user interface. Finally, full utilization is realized with the connection of RME to one or all of your yield management, TCAD, or APC systems.

Figure 1. Single editor supporting all process tools

Figure 2. Same look, feel and operations for recipes on all process tools

RME provides a secure, reliable and efficient method of managing and editing recipes off-line, increasing tool time availability as well as allowing APC systems to programmatically modify recipes at download time.

Features

• Architecture provides a mission critical solution which supports high availability, load balancing, and fail/safe operations.
• Universal off-line editor enables process engineers to create or modify process recipes at their desks, thereby increasing productivity, equipment uptime and reducing engineering time spent learning editing systems
• Recipe parameter history, parameter change notification, and audit trail enables trace back to analyze recipe problems
• E-mail based recipe approval system provides an efficient method to proceed through the sign-off loop and eliminates scrapped lots due to incorrect recipes
• Correlation of yield to recipe history enables APC solutions and improves yield
• Compliant with Semi E42 standards

Eliminates misprocessing due to incorrect recipes
Incorrectly used recipes in the wafer fabrication process lead to millions of dollars in losses every year because of the need to scrap improperly processed lots. RME ensures correct recipe is being processed on the equipment at all times, thus eliminating possible losses due to recipe misprocessing.

Minimizes tool time required for recipe qualification
Process engineers edit any process tool recipe off-line using RDOM technology. Authorized users can change the values of specified parameters within a pre-defined range. For multi-step processes like etch, RME allows parameters to have different minimum and maximum limits within single step. Offline recipe creation and verification reduces tool time used for recipe qualification.

Enables fast and secure recipe data sharing
RME provides secure and automated system to share the contents of process recipes along with wafer sequencing between sites or technology partners.